Precision of micromilled x-ray masks and exposures

Microsystem Technologies

Volumn 4, Issue 1, 1997, Pages 21-24

  Friedrich, C ^a   Coane, P ^b   Goettert, J ^b   Gopinathin, N ^b  

^a MICHIGAN TECHNOLOGICAL UNIVERSITY   (United States)

^b LOUISIANA TECH UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0010352171     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s005420050085     Document Type: Article

References (5)

1. Coane P; Friedrich C: (1996) Fabrication of composite x-ray masks by micromilling In: Microlithography and Micromachining II. Michael Postek, Craig Friedrich, Editors, Proc. SPIE 2880, pp. 130-141
2. Friedrich C; Vasile M: (1996) Development of the micromilling process for high aspect ratio microstructures. J. MEMS (5)1, pp. 33-38
3. Friedrich C; Vasile M: (1996a) The micromilling process for high aspect ratio microstrucrures. Microsystem Technologies (2)3, pp. 144-148
4. Gopinathin N: (1997) Direct fabrication of x-ray masks for liga by micromilling. MS Thesis, Louisiana Tech University, Ruston, LA.
5. Vasile M; Friedrich C; Kikkeri B; McElhannon R: (1997) Micron-scale machining: tool fabrication and initial results. Precision Engineering (119) 2/3, pp. 180-186