UV laser beam shaping by multifaceted beam integrators: Fundamental principles and advanced design concepts

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2703, Issue , 1996, Pages 62-73

  Henning, Thomas F E ^a   Unnebrink, Lars ^a   Scholl, Marcus ^b  

^a RWTH AACHEN UNIVERSITY   (Germany)

^b FRAUNHOFER INSTITUTE FOR LASER TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COHERENT LIGHT; ELECTRIC NETWORK ANALYSIS; EXCIMER LASERS; GAS LASERS; LASER BEAMS; LASER RADIATION; LASERS; MICROELECTRONICS;

ADVANCED DESIGNS; BEAM PROFILES; BEAM TRANSFORMATIONS; BEAMLET; COHERENCE FUNCTIONS; EXCIMER LASER RADIATIONS; FUNDAMENTAL PRINCIPLES; HOMOGENEOUS ILLUMINATIONS; INCOMING BEAMS; NEW CONCEPTS; SIMPLE MODELS; SPATIAL COHERENCES; SPECIFIC STRUCTURING; THEORETICAL ANALYSES; UV LASER BEAMS; UV LASERS; UV WAVELENGTHS; WORK PIECES;

INTEGRATION;

EID: 0009989519     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.237772     Document Type: Conference Paper

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