Nd:YAG laser machining with multilevel resist kinoforms

Applied Optics

Volumn 30, Issue 25, 1991, Pages 3604-3606

  Ekberg, Mats ^a   Larsson, Michael ^a   Bolle, Aldo ^a   Hard, Sverker ^a  

^a CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

Author keywords

Kinoform; Laser machining; Phase hologram

Indexed keywords

EID: 0009990797     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.30.003604     Document Type: Article

References (9)

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