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Volumn 98, Issue 1-3, 1998, Pages 1228-1232
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Plasma assisted deposition of Pd thin films
a d a b b b b c
d
NONE
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Author keywords
Pd thin films; Plasma sputter deposition
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Indexed keywords
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EID: 0009859573
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(97)00226-0 Document Type: Article |
Times cited : (5)
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References (8)
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