Optical constants of aluminum films in the extreme ultraviolet interval of 82–77 nm

Applied Optics

Volumn 35, Issue 28, 1996, Pages 5692-5697

  Larruquert, J I ^a   Mendez J A ^a   Aznarez J A ^a  

^a CSIC   (Spain)

Author keywords

Aluminum; Extreme ultraviolet; Reflectance; Refractive index; Thin films

Indexed keywords

EID: 0009801272     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.35.005692     Document Type: Article

References (20)

1. Lyman, Assessment Study (European Space Agency, Paris, 1985), SCI(85), Vol. 4.
2. G. Hass and W. R. Hunter, “Calculated reflectance of aluminum-overcoated iridium in the vacuum ultraviolet from 500 A to 2000 A,” Appl. Opt. 6, 2097-2100 (1967).
3. W. J. Choyke, W. D. Partlow, E. P. Supertzi, F. J. Venskytis, and G. B. Brandt, “Silicon-carbide diffraction grating for the vacuum ultraviolet: feasibility,” Appl. Opt. 16, 2013-2014 (1977).
4. G. M. Blumenstock and R. A. M. Keski-Kuha, “Ion-beam-deposited boron carbide coatings for the extreme ultraviolet,” Appl. Opt. 33, 5962-5963 (1994).
5. R. P. Madden, L. R. Canfield, and G. Hass, “On the vacuum-ultraviolet reflectance of evaporated aluminum before and during oxidation,” J. Opt. Soc. Am. 53, 620-625 (1963).
6. H. Ehrenreich, H. R. Philipp, and B. Segall, “Optical properties of aluminum,” Phys. Rev. 132, 1918-1928 (1963).
7. W. R. Hunter, “Optical constants of metals in the extreme ultraviolet. II. Optical constants of aluminum, magnesium, and indium at wavelengths shorter than their critical wavelengths,” J. Opt. Soc. Am. 54, 208-212 (1964).
8. R. C. Vehse, E. T. Arakawa, and J. L. Stanford, “Normal-incidence reflectance of aluminum films in the wavelength region 800-2000 A,” J. Opt. Soc. Am. 57, 551-552 (1967).
9. R. W. Ditchburn, F. R. S. Freeman, and G. H. C. Freeman, “The optical constants of aluminium from 12 to 36 eV,” Proc. R. Soc. London Ser. A 294, 20-37 (1966).
10. A. Daude, A. Savary, G. Jezequel, and S. Robin, “Proprietes optiques de l’aluminium evapore en ultravide entre 500 et 1400 A,” C. R. Acad. Sci. Paris B 269, 901-904 (1969).
11. 3,” DESY report SR-74/7 (Deutsches ElektronSynchrotron, Hamburg, 1974).
12. R. La Villa and H. Mendlowitz, “Optical constants of aluminum in vacuum ultraviolet,” Phys. Rev. Lett. 9, 149-150 (1962).
13. C. J. Powell, “Analysis of optical- and inelastic-electronscattering data. II. Application to Al,” J. Opt. Soc. Am. 60, 78-93 (1970).
14. P. C. Gibbons, S. E. Schnatterly, J. J. Ritsko, and J. R. Fields, “Line shape of the plasma resonance in simple metals,” Phys. Rev. B 13, 2451-2460 (1976).
15. E. Shiles, T. Sasaki, M. Inokuti, and D. Y. Smith, “Self consistency and sum-rule tests in the Kramers-Kronig analysis of optical data: applications to aluminum,” Phys. Rev. B 22, 1612-1628 (1980).
16. J. I. Larruquert, J. A. Mendez, and J. A. Aznarez, “Far UV reflectance measurements and optical constants of unoxidized aluminum films,” Appl. Opt. 34, 4892-4899 (1995).
17. J. A. Aznarez, J. I. Larruquert, and J. A. Mendez, “Far ultraviolet reflectometer for optical constants determination of ultra high vacuum prepared thin films,” Rev. Sci. Instrum. 67, 497-502 (1996).
18. J. J. Hopfield, “New ultraviolet spectrum of helium,” Astro-phys. J. 72, 133-145 (1930).
19. Y. Tanaka, A. S. Jursa, and F. J. LeBlanc, “Continuous emission spectra of rare gases in the vacuum ultraviolet region. II. Neon and helium,” J. Opt. Soc. Am. 48, 304-308 (1958).
20. P. Croce, “Sur l’effet des couches tres minces et des rugosites sur la reflexion, la transmission et la diffusion de la lumiere par un dioptre,” J. Opt. 8, 127-139 (1977).