In-process Characterization of Microtopographies of Engineering Surfaces Using Polychromatic Speckje Autocorrelation;In-process-Charakterisierung von Mikrotopographien technischer Oberflächen durch polychromatische Speckleautokorrelation

Technisches Messen

Volumn 66, Issue 7-8, 1999, Pages 269-276

  Lehmann, Peter ^a   Patzelt, Stefan ^a   Ciossek, Andreas ^a  

^a UNIVERSITY OF BREMEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

APPLICATION OF LASER; ENGINEERING SURFACES; MEASUREMENT EFFECTS; MEASUREMENT METHODS; MICRO TOPOGRAPHY; POLYCHROMATIC SPECKLES; PROGRESS MEASUREMENT; SURFACE MICROTOPOGRAPHY;

INSTRUMENTS; MEASUREMENTS;

SPECKLE;

EID: 0009478631     PISSN: 01718096     EISSN: None     Source Type: Journal    
DOI: 10.1524/teme.1999.66.78.269     Document Type: Article

References (5)

1. Caber, P. J.: Interferometric profiler for rough surfaces. Appl. Optics 32 (1993) 3438–3441.
2. Parry, G.: Some effects of surface roughness on the appearence of speckle in polychromatic light. Opt. Commun. 12 (1974) 75–78.
3. Stansberg, C. T.: Surface roughness measurements by means of polychromatic speckle patterns. Appl. Optics 18 (1979) 4051–4060.
4. Pedersen, H. M.: Second order statistics of light diffracted from gaussian, rough surfaces with applications to the roughness dependence of speckles. Optica Acta 22 (1975) 523–535.
5. Lehmann, P.: Untersuchungen zur Lichtstreuung an technischen Oberflächen im Hinblick auf eine prozeßgekoppelte laseroptische Rauheitsmessung. Fortschritt-Berichte VDI, Reihe 8, Nr. 463, VDI-Verlag, Düsseldorf 1995.