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Volumn 32, Issue 19, 1993, Pages 3438-3441

Interferometric profiler for rough surfaces

Author keywords

[No Author keywords available]

Indexed keywords

OPTICS; SURFACES; DIGITAL SIGNAL PROCESSING; SIGNAL PROCESSING; SURFACE MEASUREMENT;

EID: 0027639146     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.32.003438     Document Type: Article
Times cited : (353)

References (10)
  • 1
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    • J. M. Bennett, ed., Proc. Soc. Photo-Opt. Instrum. Eng
    • M. Stedman, “Limits of surface measurements by optical probes,” in Surface Measurement and Characterization, J. M. Bennett, ed., Proc. Soc. Photo-Opt. Instrum. Eng. 1009, 62-66 (1988).
    • (1988) Surface Measurement and Characterization , vol.1009 , pp. 62-66
    • Stedman, M.1
  • 2
    • 0000567823 scopus 로고
    • Phase-shifting interferometry techniques
    • E. Wolf, ed, Elsevier, New York
    • K. Creath, “Phase-shifting interferometry techniques,” in Progress in Optics, E. Wolf, ed. (Elsevier, New York, 1988), Vol. 26, pp. 357-373.
    • (1988) Progress in Optics , vol.26 , pp. 357-373
    • Creath, K.1
  • 3
    • 0022001763 scopus 로고
    • Multiple-wavelength phase shifting interferometry
    • Y-Y. Cheng and J. C. Wyant, “Multiple-wavelength phase shifting interferometry,” Appl. Opt. 24, 804-806 (1985).
    • (1985) Appl. Opt , vol.24 , pp. 804-806
    • Cheng, Y.-Y.1    Wyant, J.C.2
  • 4
    • 84975670608 scopus 로고
    • Two-wavelength phase-shifting interferometer and method
    • May
    • J. C. Wyant and K. Creath, “Two-wavelength phase-shifting interferometer and method,” U.S. patent 4, 832, 489 (23 May 1989).
    • (1989) U.S. Patent , vol.832-489 , Issue.4 , pp. 23
    • Wyant, J.C.1    Creath, K.2
  • 5
    • 84957477993 scopus 로고
    • An application of interference microscopy to integrated circuitinspection and metrology
    • K. M. Monahan, ed., Proc. Soc. Photo-Opt. Instrum. Eng
    • M. Davidson, K. Kaufman, I. Mazor, and F. Cohen, “An application of interference microscopy to integrated circuitinspection and metrology,” in Integrated Circuit Metrology, Inspection, and Process Control, K. M. Monahan, ed., Proc. Soc. Photo-Opt. Instrum. Eng. 775, 233-247 (1987).
    • (1987) Integrated Circuit Metrology, Inspection, and Process Control , vol.775 , pp. 233-247
    • Davidson, M.1    Kaufman, K.2    Mazor, I.3    Cohen, F.4
  • 6
    • 84955326631 scopus 로고
    • Mirau correlation microscope
    • G. S. Kino and S. Chim, “Mirau correlation microscope,” Appl. Opt. 29, 3775-3783 (1990).
    • (1990) Appl. Opt , vol.29 , pp. 3775-3783
    • Kino, G.S.1    Chim, S.2
  • 7
    • 84903983714 scopus 로고
    • Profilometry with a coherence scanning microscope
    • B. S. Lee and T. C. Strand, “Profilometry with a coherence scanning microscope,” Appl. Opt. 29, 3784-3788 (1990).
    • (1990) Appl. Opt , vol.29 , pp. 3784-3788
    • Lee, B.S.1    Strand, T.C.2
  • 8
    • 84861309273 scopus 로고
    • Artech, Dedham, Mass, Chap
    • F. de Coulon, Signal Theory and Processing (Artech, Dedham, Mass., 1986), Chap. 11, pp. 381-391.
    • (1986) Signal Theory and Processing , vol.11 , pp. 381-391
    • Decoulon, F.1
  • 9
    • 0011260121 scopus 로고
    • Rough surface profiler and method
    • July
    • D. K. Cohen, P. J. Caber, and C. P. Brophy, “Rough surface profiler and method,” U.S. patent 5, 133, 601 (28 July 1992).
    • (1992) U.S. Patent , vol.133-601 , Issue.5 , pp. 28
    • Cohen, D.K.1    Caber, P.J.2    Brophy, C.P.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.