Perturbation solution for the interfacial oxidation of silicon

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 4, 1998, Pages 2121-2124

  Mhetar, Vijay R ^a   Archer, L A ^a  

^a Department of Electrical and Computer Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0009447895     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590140     Document Type: Article

References (7)

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6. M. Abramowitz and I. A. Stegun, Handbook of Mathematical Functions (Dover, New York, 1965).
7. T. K. Whidden, P. Thanikasalam, M. J. Rack, and D. K. Ferry, J. Vac. Sci. Technol. B 13, 1618 (1995).