In situ ultrasonic measurement of photoresist glass transition temperature

Applied Physics Letters

Volumn 72, Issue 19, 1998, Pages 2457-2459

  Morton, Susan L ^a   Degertekin, F Levent ^a   Khuri Yakub, B T ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0009381832     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.121381     Document Type: Article

References (7)

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