The multilayer-modified Stoney's formula for laminated polymer composites on a silicon substrate

Journal of Applied Physics

Volumn 86, Issue 10, 1999, Pages 5474-5479

  Kim, Jin S ^a   Paik, Kyung W ^a   Oh, Seung H ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0008966228     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.371548     Document Type: Article

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