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Volumn 70, Issue 20, 1997, Pages 2744-2746

External gettering by aluminum-silicon alloying observed from carrier recombination at dislocations in float zone silicon wafers

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0008523336     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.119009     Document Type: Article
Times cited : (18)

References (18)
  • 14
    • 6044276517 scopus 로고
    • edited by W. C. O'Mara, R. B. Herring, and Lee P. Hunt Noyes, Park Ridge, NJ
    • R. A. Seilheimer, in Handbook of Semiconductor Silicon Technology, edited by W. C. O'Mara, R. B. Herring, and Lee P. Hunt (Noyes, Park Ridge, NJ, 1990), p. 763.
    • (1990) Handbook of Semiconductor Silicon Technology , pp. 763
    • Seilheimer, R.A.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.