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Volumn 155, Issue 2, 1996, Pages 321-332

Precipitation of Cu, Ni, and Fe on Frank-Type partial dislocations in Czochralski-grown silicon

Author keywords

[No Author keywords available]

Indexed keywords

COOLING; COPPER; CRYSTAL DEFECTS; CRYSTAL STRUCTURE; DIFFUSION IN SOLIDS; DISLOCATIONS (CRYSTALS); IMPURITIES; IRON; NICKEL; PRECIPITATION (CHEMICAL); SEGREGATION (METALLOGRAPHY);

EID: 0030165435     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/pssa.2211550205     Document Type: Article
Times cited : (20)

References (25)
  • 3
    • 0006178014 scopus 로고
    • Ed. H. R. HUFF, W. BERGHOLZ, and K. SUMINO, Electrochem. Soc., Pennington
    • D. GILLES and H. EWE, in: Semiconductor Silicon 1994, Ed. H. R. HUFF, W. BERGHOLZ, and K. SUMINO, Electrochem. Soc., Pennington 1994 (p. 772).
    • (1994) Semiconductor Silicon 1994 , pp. 772
    • Gilles, D.1    Ewe, H.2
  • 18
    • 85033851188 scopus 로고
    • Doctor Thesis, Tohuko University (Japan)
    • H. TAKAHASHI, Doctor Thesis, Tohuko University (Japan), 1994.
    • (1994)
    • Takahashi, H.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.