CMOS-compatible integration of thin ferromagnetic films

Sensors and Actuators: A. Physical

Volumn 42, Issue 1-3, 1994, Pages 582-584

  Sauer, Bodo ^a   Gottfried Gottfried, Ralf ^a   Haase, Thomas ^a   Kück, Heinz ^a  

^a FRAUNHOFER INSTITUTE FOR MICROELECTRONIC CIRCUITS AND SYSTEMS   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0008190322     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(94)80058-8     Document Type: Article

References (7)

1. Planar process for 8-μm period bubble devices using polyimide design
2. Magnetic structural and magnetoresistive properties of magnetron-sputtered thin Ni-Fe films
3. Selective microelectrodeposition of Ni-Fe patterns
4. Reaction between permalloy and several thin metal films
5. Review of fluxgate sensors
6. Micromachined solenoids for highly sensitive magnetic sensors