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Volumn 11, Issue 1, 1998, Pages 81-84

Dissociative excitation of some gaseous organosilicon compounds by electron impact

Author keywords

Electron impact; Emission spectrum; Organosilicon compounds

Indexed keywords


EID: 0007878868     PISSN: 09149244     EISSN: None     Source Type: Journal    
DOI: 10.2494/photopolymer.11.81     Document Type: Article
Times cited : (2)

References (25)
  • 1
    • 0021547329 scopus 로고
    • L. Thompson, C. G. Willson and J. M. J. Frechet, Ed., ACS Symposium Series 266, American Chemical Soc., Washington, D. C.
    • R. D. Miller, D. Hofer, D. R. McKean, C. G. Willson, R. West, and P. Trefonas, Materials for Microlithography, L. Thompson, C. G. Willson and J. M. J. Frechet, Ed., ACS Symposium Series 266, American Chemical Soc., Washington, D. C. (1984) p 293.
    • (1984) Materials for Microlithography , pp. 293
    • Miller, R.D.1    Hofer, D.2    McKean, D.R.3    Willson, C.G.4    West, R.5    Trefonas, P.6


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.