Cold remote nitrogen plasma effects on pulsed laser deposited CNx films characteristics

Carbon

Volumn 36, Issue 5-6, 1998, Pages 785-789

  Jama, C ^a   Goudmand, P ^a  

^a UNIV LILLE   (France)

Author keywords

A. Carbon nitride; B. Laser ablation; B. Plasma deposition; C. XPS; D. Surface properties

Indexed keywords

EID: 0007795439     PISSN: 00086223     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0008-6223(98)00005-0     Document Type: Article

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