Structural, electrical and optical properties of SnO2-X:F-layers deposited by DC-reactive magnetron-sputtering from a metallic target in Ar-O2/CF4 mixtures

Surface and Coatings Technology

Volumn 98, Issue 1-3, 1998, Pages 1267-1271

  Mientus, R ^a   Ellmer, K ^b  

^a Opto Transmitter U   (Germany)

^b HAHN MEITNER INSTITUT   (Germany)

Author keywords

Fluorine doped tin dioxide; Reactive magnetron sputtering; SuO2; Tin fluorides

Indexed keywords

EID: 0007673898     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00247-8     Document Type: Article

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