In-situ diagnostics for preparation of laser crystallized silicon films on glass for solar cells

Thin Solid Films

Volumn 337, Issue 1-2, 1999, Pages 98-100

  Andra G ^a   Bergmann, J ^a   Falk, F ^a   Ose, E ^a  

^a LEIBNIZ INSTITUTE OF PHOTONIC TECHNOLOGY   (Germany)

Author keywords

Laser crystallization; Optical diagnostics; Polycrystalline silicon layers; Time resolved measurement

Indexed keywords

EID: 0007504391     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)01191-2     Document Type: Article

References (8)

1. H. Kuriyama, T. Hohda, Y. Aya, T. Kuwahara, K. Wakisaka, S. Kiyama, S. Tsuda, Jpn. J. Appl. Phys. Part 1 33 (1994) 5657.
2. J.S. Im, R.S. Sposili, M.A. Crowder, Appl. Phys. Lett. 70 (1997) 3434.
3. G.E. Jellison Jr., D.H. Lowndes, D.N. Mashburn, R.N. Wood, Phys. Rev. B 34 (1986) 2407.
4. F. Foulon, E. Fogarassy, A. Slaoui, C. Fuchs, S. Unamuno, P. Siffert, Appl. Phys. A 45 (1988) 361.
5. G. Andrä, J. Bergmann, F. Falk, E. Ose, H. Stafast, Phys. Stat. Sol. (A) 166 (1998) 629.
6. G. Andrä, J. Bergmann, F. Falk, E. Ose, Thin Solid Films 318 (1998) 42.
7. D.H. Auston, J.A. Golvchenko, A.L. Simons, C.M. Surkow, T.N.C. Venkatesan, Appl. Phys. Lett. 34 (1979) 777.
8. J. Boneberg, J. Nedelcu, H. Bender, P. Leiderer, Mater. Sci. Eng. A173 (1993) 347.