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Volumn 51, Issue 12, 1997, Pages 936-941

Activated high-rate-deposition;Aktivierte hochratebeschichtung: Neue entwicklungen in der vakuumbogenbeschichtung und deren anwendungen

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0007324483     PISSN: 00260797     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article
Times cited : (2)

References (10)
  • 1
    • 5544261854 scopus 로고
    • Fundamental Phenomena in Nucleation and Growth of Crystals
    • Chamberad, A.; Hillrairet, J. (Eds.)
    • Besmond, J. H.: Fundamental Phenomena in Nucleation and Growth of Crystals. In: Chamberad, A.; Hillrairet, J. (Eds.): Metallic Multilayers, Materials Science Forum 59&60 (1990), S. 1-40
    • (1990) Metallic Multilayers, Materials Science Forum , vol.59-60 , pp. 1-40
    • Besmond, J.H.1
  • 2
    • 5544326196 scopus 로고    scopus 로고
    • Behavior of Random Cathodic Arcs on Ti-Targets in Dependence on Electrical Parameters
    • Hecht, G.; Richter, F.; Hahn, J. (Her.): Oberursel
    • Mecke, H.; Ellrodt, M.: Behavior of Random Cathodic Arcs on Ti-Targets in Dependence on Electrical Parameters. In: Hecht, G.; Richter, F.; Hahn, J. (Her.): Thin Films, DGM Informationsgesellschaft, Oberursel, S. 135-138
    • Thin Films, DGM Informationsgesellschaft , pp. 135-138
    • Mecke, H.1    Ellrodt, M.2
  • 3
    • 0028671119 scopus 로고
    • High-current arc - A new source for high-rate deposition
    • Siemroth, P.; Schülke, T.; Witke, T.: High-current arc - a new source for high-rate deposition. Surface and Coating Technology 68/69 (1994), S. 314-319
    • (1994) Surface and Coating Technology , vol.68-69 , pp. 314-319
    • Siemroth, P.1    Schülke, T.2    Witke, T.3
  • 4
    • 0003121309 scopus 로고
    • Lasergestützte Bogenbeschichtung (LASER-ARC)
    • Metall Verlag GmbH, Berlin/Heidelberg
    • Scheibe, H.-J.; Siemroth, P.: Lasergestützte Bogenbeschichtung (LASER-ARC). Jahrbuch Oberflächentechnik, Bd. 48, Metall Verlag GmbH, Berlin/Heidelberg (1992), S. 339-359
    • (1992) Jahrbuch Oberflächentechnik , vol.48 , pp. 339-359
    • Scheibe, H.-J.1    Siemroth, P.2
  • 5
    • 0042738645 scopus 로고    scopus 로고
    • Harte amorphe Kohlenstoffschichten
    • Hüthig Verlag, Heidelberg
    • Schultrich, B.; Scheibe, H.-J.: Harte amorphe Kohlenstoffschichten. Jahrbuch Oberflächentechnik, Bd. 52, Hüthig Verlag, Heidelberg (1996), S. 109-129
    • (1996) Jahrbuch Oberflächentechnik , vol.52 , pp. 109-129
    • Schultrich, B.1    Scheibe, H.-J.2
  • 6
    • 0031211898 scopus 로고    scopus 로고
    • Macroparticle Filtering of High-Current Vacuum Arc Plasmas
    • August 1997
    • Schülke, T.; Anders, A.; Siemroth, P.: Macroparticle Filtering of High-Current Vacuum Arc Plasmas. IEEE Transact. Plasma Sci. 25(1997) N4 (August 1997)
    • (1997) IEEE Transact. Plasma Sci. , vol.25
    • Schülke, T.1    Anders, A.2    Siemroth, P.3
  • 7
    • 0028446359 scopus 로고
    • Lichtbogengestützte Beschichtung bandförmiger Materialien
    • Hasse, B.; Müller, R.; Siefert, W.: Lichtbogengestützte Beschichtung bandförmiger Materialien. Metalloberfläche 48 (1994), S. 418-421
    • (1994) Metalloberfläche , vol.48 , pp. 418-421
    • Hasse, B.1    Müller, R.2    Siefert, W.3
  • 9
    • 0028741222 scopus 로고
    • Plasma Activated High-Rate EB Evaporation Using Spotless Cathodic Arc
    • Goedicke, K.; Scheffel, B.; Schiller, S.: Plasma Activated High-Rate EB Evaporation Using Spotless Cathodic Arc. Surface Coating Technology 68/69 (1994), S. 799-803
    • (1994) Surface Coating Technology , vol.68-69 , pp. 799-803
    • Goedicke, K.1    Scheffel, B.2    Schiller, S.3
  • 10
    • 0029252753 scopus 로고
    • Low voltage - High current discharge of Ti-Vapour in high vacuum
    • Kajioka, K.; Higuchi, K.; Nakasone, M.: Low voltage - high current discharge of Ti-Vapour in high vacuum. Thin Solid Films 256 (1995) S. 124-135
    • (1995) Thin Solid Films , vol.256 , pp. 124-135
    • Kajioka, K.1    Higuchi, K.2    Nakasone, M.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.