Copolymer approach to charge-dissipating electron-beam resists

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 6, 1998, Pages 3701-3704

  Hupcey, Maggie A Z ^a   Ober, Christopher K ^a  

^a Department of Obstetrics Gynecology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0006897461     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590393     Document Type: Article

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