Use of oxygen gas in diamond film growth for improving stress and crystallinity properties of an x-ray mask

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 3, 1998, Pages 1167-1173

  Noguchi, Hitoshi ^a   Kubota, Yoshihiro ^a   Takarada, Takayuki ^b  

^a SHIN ETSU CHEMICAL CO LTD   (Japan)

^b GUNMA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0006671430     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590027     Document Type: Article

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