Theoretical consideration of plasma-processing processes

Advances in Atomic, Molecular and Optical Physics

Volumn 44, Issue C, 2001, Pages 33-57

  Kimura, Mineo ^a  

^a YAMAGUCHI UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0006420563     PISSN: 1049250X     EISSN: None     Source Type: Book Series    
DOI: 10.1016/S1049-250X(01)80028-8     Document Type: Article

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