Laser fabrication of micron-size apertures for electron beam microcolumns

Applied Physics A: Materials Science and Processing

Volumn 69, Issue 7, 1999, Pages

  Ahn, S J ^a   Kim, D W ^a   Kim, H S ^a   Cho, K H ^b   Choi, S S ^a  

^a SunMoon University   (South Korea)

^b Korea Military Academy   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0006404483     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s003390051461     Document Type: Article

References (7)

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3. H. Beyer, W. Ross, R. Rudolph, A. Michaelis, J. Uhlenbusch, W. Viol: J. Appl. Phys. 70, 75 (1991)
4. V. Oliveira, R. Vilar: J. Mater. Res. 12, 3206 (1997)
5. S.M. Meter, V.P. Veiko: Laser-Assisted Microtechnology (Springer-Verlag, Berlin) Chapt. 3, Chapt. 6
6. X. Liu, D. Du, G. Mourou: IEEE. J. Quantum Electron. QE-33, 1706 (1997)
7. J. Wilson, J.F.B. Hawkes: Lasers: Principles and Applications (Prentice Hall, Englewood Cliffs NJ 1994)