CARBON THIN FILMS.

Plasma Deposited Thin Films

Volumn , Issue , 1986, Pages 89-127

  Angus, John C ^a   Koidl, Peter ^a   Domitz, Stanley ^a  

^a CASE WESTERN RESERVE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

PLASMAS - APPLICATIONS;

CATEGORIZATION/NOMENCLATURE; DEPOSITION METHODS; GROWTH ENVIRONMENT; MICROSTRUCTURE; TEMPERATURE-INDUCED GRAPHITIZATION;

CARBON;

EID: 0022949804     PISSN: None     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (181)