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Volumn 75, Issue 26, 1999, Pages 4091-4093
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The role of particle energy and pulsed particle flux in physical vapor deposition and pulsed-laser deposition
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0005947409
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.125546 Document Type: Article |
Times cited : (19)
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References (22)
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