Probe for measuring ion beam angular distribution

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 4, 1996, Pages 2106-2112

  Kahn, J R ^a   Kaufman, H R ^a,b   Phillips, C A ^a   Robinson, R S ^a,c  

^a Front Range Veterinary Clinic   (United States)

^b Commonwealth Scientific Corporation ^*  (United States)

^c Veterinary Dentistry and Oral Surgery   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0030510646     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580088     Document Type: Article

References (9)

1. Handbook of Ion Beam Processing Technology, edited by J. J. Cuomo, S. M. Rossnagel, and H. R. Kaufman (Noyes, Park Ridge, NJ, 1989).
2. G. Aston, H. R. Kaufman, and P. J. Wilbur, AIAA J. 16, 516 (1978).
3. G. Aston and H. R. Kaufman, AIAA J. 17, 64 (1979).
4. H. R. Kaufman and R. S. Robinson, AIAA J. 20, 745 (1982).
5. Ch. Huth, H.-C. Scheer, B. Schneemann, and H.-P. Stoll, J. Vac. Sci. Technol. A 8, 4001 (1990).
6. H. R. Kaufman, R. S. Robinson, and J. R. Kahn, Patent Application (1995).
7. W. S. Williamson and J. Hyman, Jr., J. Spacecraft Rockets 15, 375 (1978).
8. Commonwealth Scientific Corporation, Alexandria, Virginia 22314.
9. H. R. Kaufman, J. M. E. Harper, and J. J. Cuomo, presented at The 25th National Symposium of the American Vacuum Society, November 1978 (unpublished).