Oxygen atomic flux O* enhancement by gas-pulsed electron cyclotron resonance plasma

Journal of Applied Physics

Volumn 81, Issue 5, 1997, Pages 2114-2118

  Park, Young Ju ^a   O'Keeffe, Patrick ^b,c   Ozasa, Kazunari ^b   Mutoh, Harunobu ^c   Aoyagi, Yoshinobu ^b   Min, Suk Ki ^a  

^a Korea Institute of Science and Technology   (South Korea)

^b INST OF PHYS AND CHEMICAL RESEARCH   (Japan)

^c Irie Koken Co Ltd   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0005903397     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.364263     Document Type: Article

References (14)

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