A novel distributed system for plasma immersion ion implanter control and automation

Review of Scientific Instruments

Volumn 69, Issue 3, 1998, Pages 1495-1498

  Liu, A G ^a   Wang, X F ^a   Tang, B Y ^a   Chu, P K ^a   Ko, P K ^b   Cheng, Y C ^c  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

^b HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

^c UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0005829910     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1148785     Document Type: Article

References (5)

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3. P. K. Chu, B. Y. Tang, Y. C. Cheng, and P. K. Ko, Rev. Sci. Instrum. 68, 1866 (1997).
4. P. K. Chu, S. Qin, C. Chan, N. W. Cheung, and P. K. Ko, IEEE Trans. Plasma Sci. (to be published).
5. Hans-Georg Gohring and Franz-Joachim Kauffels, Token Ring (Addison-Wesley, Reading, MA, 1992).