New cathode structures of Si-based field emitter arrays

Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC

Volumn , Issue , 1996, Pages 534-537

  Kim, Donghwan ^a   Kwon, Sang Jik ^a   Lee, Jong Duk ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; MOSFET DEVICES; PHOTOLITHOGRAPHY; SEMICONDUCTING SILICON;

EMISSION CURRENT;

FIELD EMISSION CATHODES;

EID: 0030363114     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)