Optical microactuation in piezoceramics

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3328, Issue , 1998, Pages 374-391

  Thakoor, Sarita ^a   Poosanaas, Patcharin ^c   Morookian, John M ^a   Yavrouian, Andre ^a   Lowry, Lynn ^a   Marzwell, Neville I ^a   Nelson, Jeffrey G ^b   Neurgaonkar, Ratnakar R ^b   Uchino, Kenji ^c  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^b ROCKWELL SCIENCE CENTER   (United States)

^c PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CERAMIC MATERIALS; CONCRETE BRIDGES; CRYSTAL ORIENTATION; FILM GROWTH; INTELLIGENT STRUCTURES; LANTHANUM COMPOUNDS; LEAD COMPOUNDS; MEMS; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; OXIDE MINERALS; PEROVSKITE; PIEZOELECTRICITY; PROBABILITY DENSITY FUNCTION; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; SURFACE ROUGHNESS; THERMAL EXPANSION;

BAND GAP ENERGIES; CENTROSYMMETRIC PEROVSKITE; HIGH EFFICIENCY; HIGH STRENGTH; HIGH TEMPERATURE (HT); HIGH TEMPERATURE STABILITY; LEAD LANTHANUM ZIRCONATE TITANATE (PLZT); MECHANICAL SYSTEM (MS); MICROMACHINED STRUCTURES; NEW GENERATION; OPTICAL (PET) (OPET); PHOTONIC; PHOTOVOLTAGE (PV); PIEZOCERAMIC (PZT); PIEZOCERAMIC WAFERS; POLYBENZOXAZOLE (PBO); SUBSTRATE FILMS;

SUBSTRATES;

EID: 0005090850     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.320191     Document Type: Conference Paper

References (21)

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