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Volumn 2884, Issue , 1996, Pages 323-332
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Mask fabrication rules for proximity-corrected patterns
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Author keywords
[No Author keywords available]
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Indexed keywords
FUNCTIONS;
ASSIST FEATURES;
COMPLEX CONVOLUTIONS;
MASK FABRICATIONS;
MASK PATTERNS;
OPTICAL PROXIMITY CORRECTIONS;
PROXIMITY CORRECTIONS;
VARIATIONS OF;
MASKS;
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EID: 0005084973
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.262815 Document Type: Conference Paper |
Times cited : (10)
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References (3)
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