XYΘ actuators using piezoelectric and electromagnetic actuators

Electrical Engineering in Japan (English translation of Denki Gakkai Ronbunshi)

Volumn 131, Issue 4, 2000, Pages 44-51

  Kato, Haruna ^a   Hayakawa, Kazuaki ^a   Torii, Akihiro ^a,b,c   Ueda, Akiteru ^a,b,c  

^a AICHI INSTITUTE OF TECHNOLOGY   (Japan)

^b IEEE

^c IEE (Japan)   (Japan)

Author keywords

Actuator; Electromagnet; Piezoelectric element; Precision positioning; Resolution

Indexed keywords

EID: 0005077242     PISSN: 04247760     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1520-6416(200006)131:4<44::AID-EEJ6>3.0.CO;2-R     Document Type: Article

References (7)

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