3D computer vision for micro-assembly station and microfabrication

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3202, Issue , 1998, Pages 42-52

  Sulzmann, A ^a   Jacot, J ^a  

^a EPFL   (Switzerland)

Author keywords

3D microscopy; Computer vision; Micro assembly; Microrobot positioning; Quality control

Indexed keywords

CHARGE COUPLED DEVICES; COMPUTER VISION; CUSTOMER SATISFACTION; DATA COMMUNICATION EQUIPMENT; GRIPPERS; IMAGE PROCESSING; MICROANALYSIS; MICROFABRICATION; MICROMACHINING; MICROMANIPULATORS; MICROSYSTEMS; OBJECT RECOGNITION; QUALITY ASSURANCE; QUALITY CONTROL; QUALITY FUNCTION DEPLOYMENT; TOTAL QUALITY MANAGEMENT; TWO DIMENSIONAL;

2D OBJECTS; 3-D DISPLACEMENTS; 3-D MEASUREMENTS; 3-D WORKSPACES; 3D COMPUTER VISIONS; 3D MICROSCOPY; AUTO-FOCUS ALGORITHMS; DEPTH OF FOCUS; HIGH FREQUENCIES; HIGH PRECISION; HIGH RESOLUTION CAMERAS; LIGHT INTENSITIES; MICRO PARTS; MICRO-ASSEMBLY; MICRO-GRIPPERS; MICROGRIPPER; MICROMOTOR; MICROROBOT POSITIONING; MICROSCOPE IMAGES; NATURAL TEXTURES; RELATIVE MOTIONS;

THREE DIMENSIONAL;

EID: 0004924239     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.298044     Document Type: Conference Paper

References (30)

1. A. Sulzmann, "Hochpräzise 3D Bildverarbeitung zur visuellen Relativpositionierung von Robotersystemen in der Mikromontage", EPF Lausanne, Thesis, 1997 (in german)
2. A. Sulzmann, J.-M. Breguet, J.Jacot "Micromotor Assembly Using High Accurate Optical Vision Feedback For Microrobot Relative 3D Displacement In Submicron Range", IEEE - TRANSDUCER '97, Chicago,16.-19.06.1997, USA
3. H.Lorenz, M.Despont, N.Fahrni, J.Brugger, P.Renaud and P.Vettiger, "High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS",to be published in Sensors and Actuators A.
4. Brenner, J. et. all. An Automated Microscope for Cytologic Research- A Reliminary Evaluation, Journal of Histochemistry and Cytochemistry, vol.24, no.l, pp.100-111,1976
5. Jarvis,R.A, "Focus optimasation criteria for computer image processing", Microscopy Vol. 24, No.2 pp 163-180,1976 Autofocus,1976
6. Allegro, S., Ch. Chanel, Jacot, J.; Autofocus for automated Microassembly under a microscope, IEEE Computer Vision, Lausanne,15.-18.09.1996, Switzerland
7. Bellouard, Y., Sulzmann, A. et.all Design and highly accurate 3D displacement characterisation of monlithic SMA microgripper using 3D computer vision, SPIE, Vol. 3202, Pittsburgh, 16.-17.10.1997, USA
8. Besocke K.-H.; Mikromanipulation fur die Raster Tunnel Mikroskopy 38. internationales Wissenschaftliches Kolloquium, Dmenau, 20. - 23. 09.1993, Germany (in german)
9. Burg, B., Parametrisches optisches Messen bei der Herstellung von Mikrostrukturen mit beliebiger ebener Oberflaechen-geometrie, Thesis, Karlsruhe 1991, Germany (in german)
10. Danuser, G., Mazza, E.; Observing Deformations of 20 Nanometer with a Low Numerical Aperature Light Microscope?Proc. of the EOS Symp. on Laser, Optics and Vision..., Becanson, France, 1996
11. Dresel, T.; Häusler, G.; Venzke, H.; Three-dimensional sensing of rough surfaces by coherence radar",Applied Optics vol. 31, no. 7 (March), S. 919,1992
12. Delambilli; Microassembly at the CSEM, Swiss workshop on microassembly, EPF Lausanne, 16.05.1995
13. FL.Firestine, K.Cook, K., Culp, N.Talsania, K.Jr. Preston, A comparison of different focus functions for use in autofocus algorithms. Cytometry 12, 195-206,1991
14. Garibotto, G.; Storace, P. "3-D range estimation from the focus sharpness of edges",Image Analysis and Processing II, Plenum Press, New York, S. 321-328, 1988
15. F.C.A. Groen, I.T. Young, G. Ligthart, A comparison of different focus functions for use in autofocus algorithms. Cytometry 6, 81-91,1985
16. Hariharan, P.; Optical Interferometry, Academic Press, Australia, 1985
17. Jacot, J. Semi-automatic microassembly station, Swiss workshop on microassembly, EPF Lausanne, 16.05.1995
18. Caloz, Y., Haenny, L., Iarocci, M.; Autofocus par analyse d'image pour metallographie automatique Student-project ETHZ and Qualimatest, Geneva, 1994
19. Hoffmann, A.; 3D Qualitätskontrolle von Mikrostrukturen 1st symposium of the project "Mikrosystemtechnik", KfK 23./24.09.1993 Germany (in german)
20. Noguchi, M., Nayar, S. Microscopic shape from focus using active illumination, IEEE Robotic and Automation, 1996
21. Richards, B.P., Footner, P.K. The role of microscopy in semiconductor failure analysis, Oxford University Press, Royal Microscopical Society, 1992
22. Rotman, J.; Shape recovery from focus, Diploma thesis, Univ.-Columbia - IMT / EPF Lausanne, 1997
23. J. C. Russ; Computer Assisted Microscopy, Plenum Press, NY, 1990
24. Stout, K. et all. 3D surface topography, Measurement, interpretation and applications Penton Press, London, 1994
25. Stucky, K.-U.; "Rechnergestiitzte Vermessung von dreidimensionalen Mikrostrukturen",Kernforschungszentrum Karlsruhe, Institut fur Angewandte In- formatik, Dissertation 1994, Germany (in german)
26. Sulzmann, A., Carlier, J., Breguet J.-M., Jacot J., "Distributed Microscopy: towards a 3D computer graphic-based multi user microscopic manipulation, imaging and measurement system", SPIE's Photonics East Proc., Vol. 2901,18.-22.11.1996.
27. Wilson, T., Sheppard, C., Theory and Practice of Scanning optical Microscopy, Accademic Press, 1984
28. Wilson, T.; "Confocal Microscopy "Academic Press 1990
29. Windecker, R.;"Optisches Autofokus-Profilometer"?Technisches Messen 7/8 (60), S. 267-70, 1993
30. Wyant, J.C., Creath, K.; Advances in interferometric optical profiling, ?Int. Journal of Machine Tool and Manifacture, Vol. 32, No.l /2, pp.