Advances in interferometric optical profiling

International Journal of Machine Tools and Manufacture

Volumn 32, Issue 1-2, 1992, Pages 5-10

  Wyant, James C ^a,b   Creath, Katherine ^a,b  

^a UNIVERSITY OF ARIZONA   (United States)

^b WYKO Corporation   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

OPTICS;

DIRECT PHASE MEASUREMENT INTERFEROMETRY; INTERFEROMETRIC OPTICAL PROFILES; LINNIK INTERFEROMETERS; MICHELSON INTERFEROMETER; MICROSCOPE INFERENCE OBJECTIVE; MIRAU INTERFEROMETER; OPTICAL PROFILER; WHITE LIGHT SOURCE;

INTERFEROMETRY;

EID: 0026810040     PISSN: 08906955     EISSN: None     Source Type: Journal    
DOI: 10.1016/0890-6955(92)90053-J     Document Type: Article

References (6)

1. Development of an automatic focusing mechanism for an interference microscope
2. Step height measurement using two-wavelength phase-shifting interferometry
3. Phase-measurement interferometry techniques
4. Absolute measurement of surface roughness
5. Digital phase-shifting interferometry: a simple error-compensating phase calculating algorithm
6. Use of an ac heterodyne lateral shear interferometer with real-time wavefront correction systems