Vacuum Photothermal Processing (VPP) for Curing of the Complex Thin Film Systems

Journal of Optoelectronics and Advanced Materials

Volumn 1, Issue 4, 1999, Pages 69-80

  Golan, G ^a   Axelevitch, A ^a   Rabinovitch, E ^a   Margolin, R ^a  

^a Technological Academic Inst   (Israel)

Author keywords

Defect curing; Thin film; Vacuum photothermal processing

Indexed keywords

ALUMINA; ALUMINUM OXIDE; CURING; GERMANIUM COMPOUNDS; GLASS; GOLD COMPOUNDS; GOLD DEPOSITS; INDIUM COMPOUNDS; LIGHT SOURCES; RAPID THERMAL PROCESSING; SEMICONDUCTING GERMANIUM; SUBSTRATES;

COHERENT RADIATION; COMPLEX THIN FILM SYSTEMS; CRYSTALLINE LATTICE; ENERGETIC PHOTONS; PHOTO-THERMAL; SEMICONDUCTOR STRUCTURE; TRANSPARENT CONDUCTIVE; VOLT-AMPERE CHARACTERISTICS;

THIN FILMS;

EID: 0004800848     PISSN: 14544164     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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