Dual-function circular polarization converter for microwave/plasma processing systems

Review of Scientific Instruments

Volumn 70, Issue 2, 1999, Pages 1530-1534

  Chang, T H ^a   Barnett, L R ^a   Chu, K R ^a   Tai, F ^b   Hsu, C L ^b  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b CHUNG SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0004177102     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1149619     Document Type: Article

References (21)

1. J. Asmussen. Handbook of Plasma Processing Technology, edited by S. M. Rossnagel, J. J. Cuomo, and W. D. Westwood (Noyes, New Jersey, 1990), Chap. 11.
2. O. A. Popov, Physics of Thin Film, edited by M. H. Francombe, and J. L. Vossen (Academic, New York, 1994), pp. 121-233.
3. J. E. Stevens, High Density Plasma Sources, edited by O. A. Popov (Noyes, New Jersey, 1995), Chap. 7.
4. M. A. Lieberman and R. A. Gottscho, Physics of Thin Film, edited by M. H. Francome and J. L. Vossen (Academic, New York, 1994), pp. 25-40.
5. M. A. Lieberman and A. J. Lichtenberg, Principles of Plasma Discharges and Materials Processing (Wiley, New York, 1994), Chap. 13.
6. J. Musil and F. Zacek, Phys. Plasmas 13, 471 (1971).
7. Y. Sakamoto, Jpn. J. Appl. Phys. 16, 1993 (1977).
8. O. A. Popov and H. Waldron, J. Vac. Sci. Technol. A 7, 914 (1989).
9. J. E. Stevens, J. L. Cecchi, Y. C. Huang, and R. L. Jarecki. J. Vac. Sci. Technol. A 9, 696 (1991).
10. O. A. Popov, S. Y. Shapoval, and M. D. Yoder, Jr., Plasma Sources Sci. Technol. 1, 7 (1992).
11. O. A. Popov, J. Vac. Sci. Technol. A 8, 2909 (1990).
12. S. Samukawa, J. Vac. Sci. Technol. A 11, 2572 (1993).
13. M. Matsuoka and K. Ono, J. Vac. Sci. Technol. A 9, 691 (1991).
14. J. Asmussen, T. A. Grotjohn, P. U. Mak, and M. A. Perrin, IEEE Trans. Plasma Sci. 25, 1196 (1997).
15. A. Vegas, M. A. G. Calderon, and E. G. Bustamante, Plasma Phys. Controlled Fusion 26, 1579 (1984).
16. T. Ege and P. McAndrew, Electron. Lett. 21, 1166 (1985).
17. N. C. Albertsen and P. Skov-Madsen, IEEE Trans. Microwave Theory Tech. 31, 654 (1983).
18. J. Bornemann and V. A. Labay, IEEE Trans. Microwave Theory Tech. 43, 1782 (1995).
19. S. F. Adam, Microwave Theory and Application (Prentice-Hall, Englewood Cliffs, NJ, 1969), pp. 62 and 63.
20. L. R. Barnett, L. H. Chang, H. Y. Chen, K. R. Chu, W. K. Lau, and C. C. Tu, Phys. Rev. Lett. 63, 1062 (1989).
21. K. R. Chu, L. R. Barnett, W. K. Lau, L. H. Chang, and H. Y. Chen. IEEE Trans. Electron Devices 37, 1557 (1990).