Fabrication and characterization of volcano-shaped field emitters surrounded by planar gates

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 2, 1997, Pages 464-467

  Lee, Chun Gyoo ^a   Park, Byung Gook ^a   Lee, Jong Duk ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0003695124     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589600     Document Type: Article

References (9)

1. A. Ghis, R. Meyer, P. Rambaud, F. Levy, and T. Leroux, IEEE Trans. Electron Devices ED-38, 2320 (1991).
2. T. Kishino and S. Itoh, Technical Digest, IVMC '95. p. 1.
3. G. N. A. van Veen, B. Theunissen, K. van de Heuvel, R. Home, and A. L. Burgmans, J. Vac. Sci. Technol. B 13, 478 (1995).
4. J. E. Pogemiller, H. H. Busta, and B. J. Zimmenman, J. Vac. Sci. Technol. B 12. 680 (1994).
5. H. Busta, G. Gammie. S. Skala, J. Pogemiller, R. Nowicki, J. Hubacek, D. Devine, and R. Rao, Technical Digest, IEDM '95, p. 405.
6. K. Betsui, Technical Digest, IVMC '91, p. 26.
7. J. Itoh, K. Morikawa, Y. Tohma, and S. Kanemaru, Technical Digest, IVMC '94, p. 25.
8. C. G. Lee, B. G. Park, and J. D. Lee, IEEE Electron Device Lett. EDL-17, 115 (1996).
9. C. A. Spindt, Surf. Sci. 266, 145 (1992).