Formation of Shallow n+-p Junction in Silicon by Spin-on Technique

Physica Scripta T

Volumn 79, Issue , 1999, Pages 236-238

  Grigoras, K ^a   Pacebutas V ^a   Sabataityte, J ^a   Simkiene I ^a   Tvardauskas, H ^a   Gaubas, E ^b   Harkonen J ^c  

^a CENTER FOR PHYSICAL SCIENCES AND TECHNOLOGY   (Lithuania)

^b VILNIUS UNIVERSITY   (Lithuania)

^c AALTO UNIVERSITY   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0003463290     PISSN: 02811847     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (10)

1. Wolf, S. and Tauber, R. N., "Silicon Processing for the VLSI Era" (Lattice Press, California 1986), vol. 1, ch. 9.
2. Szlufcik, J., Sivoththaman, S., Nijs, J. F., Mertens, R. P. and Van Overstraeten, R., Proc. of the IEEE 85, 711 (1997).
3. Grigoras, K., Major, A., Šimkienė, I. and Gaubas, E., Semicond. Sci. Technol. 13, 517 (1998).
4. Mandelhorn, J., Schwartz, L. and Broder, J., J. Appl. Phys. 35, 2258 (1964).
5. Waczynski, K., Wrobel, E. and Pruszowski, Z., Electron Technol. 30, 138 (1997).
6. Grigoras, K. and Pačebutas, V., Rev. Sci. Instrum. 67, 2337 (1996).
7. Lisauskas, V., Vengalis, B., Butkutė, R., Jukna, A. and Pyragas, V., Lithuanian J. Phys. 37, 217 (1997).
8. "Phase Diagrams of Non-fusible Oxides Systems", Reference book (Edited by F. J. Talachova) (Nauka 1985), in Russian, p. 104.
9. Bowran, D. T., Saunders, G. A., Newport, R. J., Rainford, B. D. and Semin, H. B., Phys. Rev. B53, 5268 (1996).
10. Pačebutas, V., Grigoras, K. and Krotkus, A., Physics Scripta T69, 255 (1997).