Diffusion from spin-on glasses

Electron Technology (Warsaw)

Volumn 30, Issue 2, 1997, Pages 138-141

  Waczynski, K ^a   Wrobel, E ^a   Pruszowski, Z ^a  

^a SILESIAN UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

GLASS; MATHEMATICAL MODELS; SEMICONDUCTOR DOPING; SEMICONDUCTOR MATERIALS; SILICON;

JUNCTION DEPTH; SHEET RESISTANCE;

DIFFUSION IN SOLIDS;

EID: 0031341915     PISSN: 00709816     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (9)