Combined scanning tunneling and forcemicroscope with fuzzy controlled feedback

Applied Physics A: Materials Science and Processing

Volumn 66, Issue SUPPL. 1, 1998, Pages

  Battiston, F M ^a   Bammerlin, M ^a   Loppacher, Ch ^a   Guggisberg, M ^a   Luthi R ^a   Meyer, E ^a   Eggimann, F ^b   Guntherodt H J ^a  

^a UNIVERSITY OF BASEL   (Switzerland)

^b ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

AFM; ATOMIC FORCE; FEED-BACK LOOP; FREQUENCY SHIFT; FUZZY LOGIC CONTROLLERS; NON-CONTACT; PI CONTROLLER; TUNNELING CURRENT; TUNNELING MICROSCOPES;

ATOMIC FORCE MICROSCOPY; CONTROL SURFACES; FUZZY SYSTEMS; WIND TUNNELS;

FUZZY LOGIC;

EID: 0003248753     PISSN: 09478396     EISSN: 14320630     Source Type: Journal    
DOI: 10.1007/s003390051098     Document Type: Article

References (17)

1. G. Binnig, H. Rohrer, Ch. Gerber, E. Weibel: Phys. Rev. Lett. 50, 120 (1983)
2. G. Binnig, C.F. Quate, Ch. Gerber: Phys. Rev. Lett. 56, 930 (1986)
3. H.-J. Güntherodt, D. Anselmetti, E. Meyer (Eds.): Forces in Scanning Probe Methods, NATO ASI Series E: Applied Sciences Vol. 286, (Kluwer, Dordrecht 1995)
4. F.J. Giessibl: Science 267, 68 (1995)
5. S. Kitamura, M. Iwatsuki: Jpn. J. Appl. Phys. 34, L145 (1995)
6. P. Güthner: J. Vac. Sci. Technol. B 14, 2428 (1995)
7. R. Lüthi, E. Meyer, L. Howald, H. Haefke, D. Anselmetti, M. Dreier, M. Rüetschi, T. Bonner, R. Overney, J. Frommer, H.-J. Güntherodt: J. Vac. Sci. Technol. B, 12 1673 (1994)
8. Y. Sugawara, M. Ohta, H. Ueyama, S. Morita: Science 270, 1646 (1995)
9. M. Bammerlin, R. Lüthi, E. Meyer, A. Baratoff, J. Lü, M. Guggisberg, Ch. Gerber, L. Howald, H.-J. Güntherodt: Probe Microsc. 1, 3 (1997)
10. L. Howald, E. Meyer, R. Lüthi, H. Haefke, R. Overney, H. Rudin, H.-J. Güntherodt: Appl. Phys. Lett. 63, 117 (1993)
11. L.A. Zadeh: Information and Control 8, 338 (1965)
12. D. Driankov, H. Hellendoorn, M. Reinfrank: An Introduction to Fuzzy Control (Springer Berlin 1993)
13. E.H. Mamdani, S. Assilian: Int. J. Man-Machine Studies, 7(1), 1 (1975)
14. T. Takagi, M. Sugeno: IEEE Trans. Syst., Man, Cyb. 15(1), 116 (1985)
15. M. Sugeno: Inform. Sci., 36, 59 (1985)
16. G. Tarrach, R. Wiesendanger, D. Bürgler, L. Scandella, H.-J. Güntherodt: J. Vac. Sci. Technol. B 9, 677 (1991)
17. O. Ohlsson: NANOSENSORS GmbH, Aidlingen, Germany