Synthesis of Composite Films

Chemical Vapor Deposition

Volumn 4, Issue 6, 1998, Pages 253-257

  Jain, Sanjeev ^b   Gu, Shuo ^a   Hampden Smith, Mark ^a   Kodas, Toivo T ^a  

^a University of New Mexico   (United States)

^b Watkins Johnson Company   (United States)

Author keywords

Chemical vapor deposition; Composite films; Porous films; Silica; Titania

Indexed keywords

EID: 0003010606     PISSN: 09481907     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1521-3862(199812)04:06<253::AID-CVDE253>3.0.CO;2-R     Document Type: Article

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