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Volumn 136, Issue 1-2, 1998, Pages 159-165

High-resolution electron energy loss spectroscopy evidence for electron beam-induced decomposition of trimethylsilane adsorbed on Si(100)

(3) Lozano, J a Campbell, J H a Craig Jr , J H a

a UNIVERSITY OF TEXAS AT EL PASO (United States)

Author keywords

High resolution electron energy loss spectroscopy; Si(100); Temperature programmed desorption

Indexed keywords

ADSORPTION; CRYSTAL ORIENTATION; DECOMPOSITION; DESORPTION; ELECTRON BEAMS; ELECTRON ENERGY LOSS SPECTROSCOPY; HYDROGEN; SILICON COMPOUNDS; TEMPERATURE PROGRAMMED DESORPTION;

TRIMETHYLSILANE;

SEMICONDUCTING SILICON;

EID: 0032181566 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/S0169-4332(98)00338-9 Document Type: Article

Times cited : (16)

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