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Volumn 69, Issue 2, 1994, Pages 307-326

Defects and hydrogen in amorphous silicon nitride

Author keywords

[No Author keywords available]

Indexed keywords


EID: 84953985849     PISSN: 13642812     EISSN: None     Source Type: Journal    
DOI: 10.1080/01418639408240111     Document Type: Article
Times cited : (167)

References (76)
  • 42
    • 0025957694 scopus 로고
    • 1991b, Appl. Phys. Lett., 59, 3425; 1992, Phil. Mag. B, 66, 615; 1993a, Amorphous Insulating Thin Films, Materials Research Society Symposium Proceedings, Vol. 284 (Pittsburgh, Pennsylvania: Materials Research Society), p. 65; 1993b, Mater. Sci. Forum (in press)
    • ROBERTSON, J., 1991a, Phil. Mag. B, 63, 47; 1991b, Appl. Phys. Lett., 59, 3425; 1992, Phil. Mag. B, 66, 615; 1993a, Amorphous Insulating Thin Films, Materials Research Society Symposium Proceedings, Vol. 284 (Pittsburgh, Pennsylvania: Materials Research Society), p. 65; 1993b, Mater. Sci. Forum (in press).
    • (1991) Phil. Mag. B , vol.63 , pp. 47
    • Robertson, J.1
  • 43
    • 0021374999 scopus 로고
    • 1985, Amorphous Silicon Technology, Materials Research Society Symposium Proceedings, Vol. 49 (Pittsburgh, Pennsylvania: Materials Research Society), p. 215
    • ROBERTSON, J., and POWELL, M. J., 1984, Appl. Phys. Lett., 44, 415; 1985, Amorphous Silicon Technology, Materials Research Society Symposium Proceedings, Vol. 49 (Pittsburgh, Pennsylvania: Materials Research Society), p. 215.
    • (1984) Appl. Phys. Lett. , vol.44 , pp. 415
    • Robertson, J.1    Powell, M.J.2
  • 51
    • 0000063045 scopus 로고
    • STREET, R. A., 1990, Phys. Rev. B, 1991, Phys. Rev. B, 44, 10610.
    • (1991) Phys. Rev. B , vol.44 , pp. 10610
    • Street, R.A.1
  • 76
    • 0000635783 scopus 로고
    • 1991b, J. non-crystalline Solids., 137, 879
    • Yin, Z., and Smith, F. W., 1991a, J. non-crystalline Solids, 137, 871; 1991b, J. non-crystalline Solids., 137, 879.
    • (1991) J. Non-Crystalline Solids , vol.137 , pp. 871
    • Yin, Z.1    Smith, F.W.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.