Propagation of adhesives in joints during capillary adhesive bonding of microcomponents

Microsystem Technologies

Volumn 6, Issue 1, 1999, Pages 19-22

  Gerlach, A ^a   Lambach, H ^a   Seidel, D ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0002272511     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s005420050169     Document Type: Article

References (8)

1. Bacher W; Menz W; Mohr J (1995) The LIGA technique and its potential for microsystems - a survey. IEEE Trans Ind Electron 42: 431
2. Schomburg WK; Ahrens R; Bacher W; Goll C; Meinzer S; Quinte A (1998) AMANDA - low-cost production of microfluidic devices. Sensors Actuators A 70: 153-158
3. Maas D; Büstgens B; Fahrenberg J; Keller W; Ruther P; Schomburg WK; Seidel D Fabrication of microcomponents using adhesive bonding techniques. Proc. MEMS '96, San Diego, pp 331-336
4. Krippner P; Mohr J; Müller C; van der Sel C (1996) Microspectrometer for the infrared range. in Micro-Optical Technologies for Measurement, Sensors, and Microsystems, Parriaux OM; ed., Besancon, France, June 12-13, 1996, Bellingham, Wash.: Internat. Soc. for Optical Engineering, pp 277
5. Ruzzu A; Bade K; Fahrenberg J; Maas D (1998) Positioning system for catheter tips based on an active microvalve system. J Micromech Microeng 8: 161-164
6. Büstgens B; Bacher W; Menz W; Schomburg WK (1994) Micropump manufactured by thermoplastic molding. Proc. MEMS '94, Oiso, Japan, pp 18-21
7. Martin J; Bacher W; Hagena OF; Schomburg WK (1998) Strain gauge pressure and volume-flow transducers made by thermoplastic molding and membrane transfer. Proc. MEMS '98, Heidelberg, Germany, pp 361-366
8. Brandrup J (Ed.) (1989) Polymer Handbook. Wiley, New York, pp VI 420-421