Synthesis of silicon-based polymer films by UV laser ablation deposition of poly(methylphenylsilane)

Materials Science and Engineering: A

Volumn 246, Issue 1-2, 1998, Pages 36-44

  Suzuki, Masaaki ^a   Nakata, Yoshinori ^a   Nagai, Hideaki ^a   Goto, Kouhei ^a   Nishimura, Okio ^a   Okutani, Takeshi ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Film; Laser ablation; Polysilane; Silicon based polymer

Indexed keywords

DEPOSITION; LASER ABLATION; MOLECULAR WEIGHT DISTRIBUTION; POLYSILANES;

POLYMETHYLPHENYLSILANE; SILICON BASED POLYMER;

PLASTIC FILMS;

EID: 0002067672     PISSN: 09215093     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0921-5093(97)00730-2     Document Type: Article

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