Depletion layer imaging using a gaseous secondary electron detector in an environmental scanning electron microscope

Applied Physics Letters

Volumn 75, Issue 1, 1999, Pages 76-78

  Phillips, M R ^a   Toth, M ^a   Drouin, D ^b  

^a UNIVERSITY OF TECHNOLOGY SYDNEY   (Australia)

^b UNIVERSITÉ DE SHERBROOKE   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001772591     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.124281     Document Type: Article

References (8)

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8. A. L. Fletcher, B. L. Thiel, and A. M. Donald, J. Phys. D 30, 2249 (1997).