Neutron reflectometry, x-ray reflectometry, and spectroscopic ellipsometry characterization of thin SiO2 on Si

Applied Physics Letters

Volumn 73, Issue 15, 1998, Pages 2131-2133

  Dura, J A ^a   Richter, C A ^a   Majkrzak, C F ^a   Nguyen, N V ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0042620333     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.122442     Document Type: Article

References (11)

1. N. V. Nguyen and C. A. Richter, in Silicon Nitride and Silicon Dioxide Thin Insulating Films IV, edited by M. J. Deen et al., PV 97-10 (The Electrochemical Society, NJ, 1997), pp. 183-193.
2. R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (Elsevier, Amsterdam, 1986).
3. J. Yasuda and D. E. Aspnes, Appl. Opt. 33, 7435 (1994).
4. H. Malitson, J. Opt. Soc. Am. 55, 1205 (1965).
5. J. A. Dura and C. F. Majkrzak, in Semiconductor Characterization: Present Status and Future Needs, edited by W. M. Bullis, D. G. Seiler, and A. C. Diebold (AIP Press, Woodbury, NY, 1996), pp. 549-554.
6. For a theory of reflectivity data and modeling, see M. Born and E. Wolf, Principles of Optics, 6th ed. (Pergamon, Elmsford, NY, 1980), and Ref. 6.
7. L. G. Parratt, Phys. Rev. 95, 359 (1954).
8. J. F. Ankner and C. F. Majkrzak, Proc. SPIE 1738, 260 (1992).
9. There are other methods for fitting reflectivity data, such as a model independent fitting, which is also nonunique, N. F. Berk and C. F. Majkrzak, Phys. Rev. B 51, 11296 (1995).
10. A relatively new technique for direct data inversion which requires reference layers exists, which is modeled independently and provides unique results, see C. F. Majkrzak, N. F. Berk, J. A. Dura, S. K. Satija, A. Karim, J. Pedulla, and R. D. Deslattes, Physica B 248, 338 (1998).
11. N. V. Nguyen, D. Chandler-Horowitz, J. G. Pellegrino, and P. M. Amirtharaj, in Semiconductor Characterization: Present Status and Future Needs, edited by W. M. Bullis, D. G. Seiler, and A. C. Diebold (AIP Press, Woodbury, NY, 1996), pp. 438-442.