Electron-beam nanolithography, acid diffusion, and chemical kinetics in SAL-601

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 6, 1998, Pages 3773-3778

  Dobisz, Elizabeth A ^a   Fedynyshyn, Theodore N ^b,c   Ma, David ^a   Shirey, Loretta M ^a   Bass, Robert ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

^b SHIPLEY COMPANY   (United States)

^c MIT LINCOLN LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001749295     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590405     Document Type: Article

References (19)

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