Surface chemistry of 6H-SiC(0001) after reactive ion etching

Diamond and Related Materials

Volumn 6, Issue 10, 1997, Pages 1451-1455

  Sieber, N ^a   Hollering, M ^a   Ley, L ^a  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

Photoelectron spectroscopy; Reactive ion etching; Silicon carbide

Indexed keywords

EID: 0001687917     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(97)00079-4     Document Type: Article

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