Optimization of MW-PACVD diamond deposition parameters for high nucleation density and growth rate on Si3N4 substrate

Diamond and Related Materials

Volumn 6, Issue 2-4, 1997, Pages 411-416

  Buchkremer Hermanns, H ^a   Ren, H ^a   Utsch, J ^a   Weiss, H ^a  

^a UNIVERSITY OF SIEGEN   (Germany)

Author keywords

Diamond nucleation and growth; MW PACVD; Optimization method; Si3N4substrate

Indexed keywords

EID: 0001635086     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(96)00711-x     Document Type: Article

References (17)

1. B. Lux and R. Haubner, Pure Appl. Chem., 66(9) (1994) 1783.
2. P.E. Pehrsson, F.G. Celii and J.E. Butler, in R.F. Davis (ed.), Diamond Films and Coatings, Noyes Publications, Park Ridge, New Jersey, U.S.A, 1993, p.68.
3. H. Buchkremer-Hermanns, H. Ren, and H. Weiss, Diamond Relat. Mater., 5 (1996) 312.
4. S. Soderberg, A. Gerendas and M. Sjostrand, Vacuum, 41 (1990) 1317.
5. H. Liu and D.S Dandy, Diamond Relat. Mater., 4 (1995) 1173.
6. A. Gicquel, E. Anger and C. Héau, in C.M. Ferreira and M. Moisan (eds.), Microwave Discharges: Fundamentals and Applications, Plenum, New York, 1993, p.541.
7. W. Zhu, R.C. McCune, J.E. deVries, M.A. Tamor and K.Y. Simon Ng, Diamond Relat. Mater., 4 (1995) 220.
8. H. Buchkremer-Hermanns, H. Ren and H. Weiss, Surf. Coat. Technol., 74/75 (1995) 215.
9. Scientific Institute of Shanghai, Method of Orthogonal Designs, 1st. edn., People's Publishers of Shanghai, Shanghai, 1975, p.210 (in Chinese).
10. G. Taguchi, in D. Clausing (ed.), System of Experimental Design No. 1 and 2, (translation), Inipup/Kraus International Publications, New York, 1987.
11. H. Buchkremer-Hermanns, H. Ren and H. Weiss, paper presented at PSE '96, Garmisch-Partenkirchen, Sept. 1996.
12. R. Bichler, R. Haubner and B. Lux, High Temp.-High Press., 21 (1989) 576.
13. F. Silva, A. Gicquel, A. Tardieu, P. Cledat and Th. Chauveau, Diamond Relat. Mater., 5 (1996) 338.
14. A.B. Harker and J.F. DeNatale, SPIE, 1534 (1991) 2.
15. W. Zhu, R. Messier and A.R. Badzian, Proc. 1st Int. Symp. on Diamond and Diamond-like Films, Pennington, NJ, USA, Dec., 1989, p.61.
16. A. Skopp, D. Klaffke, H. Buchkremer-Hermanns, H. Ren and H. Weiss, in W.J. Bartz (ed.), Tribology Solving Friction and Wear Problems, Vol. 3, Technische Akademie Esslingen, Esslingen, 1996, p.1943.
17. Circ. 539, Vol. 25, Natl. Bur. Stand. (U.S.), 1953.