Properties of CeO2 thin films deposited on Si(100) and Si(111) substrates by radio frequency-magnetron sputtering

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 3, 1998, Pages 1098-1101

  Jang, S H ^a   Jung, D ^a   Roh, Y ^a  

^a Sungkyunkwan University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001628786     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (9)

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